Linear and angular benzobisoxadisiloles 14 and 16 can serve as the precursors for stepwise generations of the syntetic equivalents of 1,4- and 1,3-benzdiynes. Benzynes generated were trapped as [4+2] cycloaddition products. Two identical or different rings can be fused to the benzdiyne equivalents. Highly substituted arenes were obtained by removing the oxygen bridges from the furan adducts. The synthesis of naphthoxadisilole 28, which can serve as the precursor of 2,3-naphthyne, is also described.