In this work, atomic layer etching (ALE) of thin film GaN (0001) is reported in detail using sequential surface modification by BCl3 adsorption and removal of the modified surface layer by low energy Ar plasma exposure in a reactive ion etching system. The estimated etching rates of GaN were ~0.74 nm/cycle. The GaN was removed over AlGaN after 135 cycles. To study the mechanism of the etch, detailed characterization and analyses were carried out, including scanning electron microscope (SEM), X-ray photoelectron spectroscopy (XPS) and atomic force microscope (AFM). It was found that in the presence of GaClx after surface modification by BCl3, the GaClx was disappeared after low energy Ar plasma exposure, which effectively ed the mechanism of atomic layer etch. This technique enables a uniform and reproducible fabrication process for enhancement-mode high electron mobility transistors with a p-GaN gate.
As gasoline is a non-renewable source, scientists are continuing to find new sources which could replace the role of gasoline that are much cleaner and environmentally friendly. Natural gas is a good opinion as it reduces the amount of SOx, COx, and NOx being emitted and costs less compared to gasoline. The problems come as the volumetric energy density is much lower than expected. Scientists suggested three ways to overcome this challenge: CNG (Compressed natural gas), LNG (liquefied natural gas), and ANG (adsorbed natural gas). Metal-organic frameworks have been introduced for natural gas storage. The advantages and disadvantages of ANG using metal-organic frameworks (MOFs) have been discussed in detail. The quantification factors, such as gravimetric and volumetric uptake, adsorption conditions, thermal properties, and isosteric heat of adsorption usable methane capacity and morphology, are also mentioned for methane storage. Different metal-organic frameworks are compared to find the best material for methane storage. Considering all these quantification factors above between different MOFs, PCN-14 is the best MOF and has been widely used worldwide for methane storage. The paper hopes to provide state-of-the-art opinions regarding the application of MOFs in methane storage and facilitates the future of renewable energy usage.
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