We demonstrate a hybrid integrated and widely tunable diode laser with an intrinsic linewidth as narrow as 40 Hz, achieved with a single roundtrip through a low-loss feedback circuit that extends the cavity length to 0.5 meter on a chip. Employing solely dielectrics for single-roundtrip, single-mode resolved feedback filtering enables linewidth narrowing with increasing laser power, without limitations through nonlinear loss. We achieve single-frequency oscillation with up to 23 mW fiber coupled output power, 70-nm wide spectral coverage in the 1.55 µm wavelength range with 3 mW output and obtain more than 60 dB side mode suppression. Such properties and options for further linewidth narrowing render the approach of high interest for direct integration in photonic circuits serving microwave photonics, coherent communications, sensing and metrology with highest resolution.
Hybrid integrated semiconductor laser sources offering extremely narrow spectral linewidth as well as compatibility for embedding into integrated photonic circuits are of high importance for a wide range of applications. We present an overview on our recently developed hybrid-integrated diode lasers with feedback from low-loss silicon nitride (Si3N4 in SiO2) circuits, to provide sub-100-Hz-level intrinsic linewidths, up to 120 nm spectral coverage around 1.55 µm wavelength, and an output power above 100 mW. We show dual-wavelength operation, dual-gain operation, laser frequency comb generation, and present work towards realizing a visible-light hybrid integrated diode laser.
Abstract:We report the observation of second-harmonic generation (SHG) in stoichiometric silicon nitride waveguides grown via low-pressure chemical vapor deposition (LPCVD). Quasirectangular waveguides with a large cross section were used, with a height of 1 µm and various different widths, from 0.6 to 1.2 µm, and with various lengths from 22 to 74 mm. Using a mode-locked laser delivering 6-ps pulses at 1064 nm wavelength with a repetition rate of 20 MHz, 15% of the incoming power was coupled through the waveguide, making maximum average powers of up to 15 mW available in the waveguide depending on the waveguide cross section. Second-harmonic output was observed with a delay of minutes to several hours after the initial turn-on of pump radiation, showing a fast growth rate between 10 −4 to 10 −2 s −1 , with the shortest delay and highest growth rate at the highest input power. After this first, initial build-up (observed delay and growth), the second-harmonic became generated instantly with each new turn-on of the pump laser power. Phase matching was found to be present independent of the used waveguide width, although the latter changes the fundamental and second-harmonic phase velocities. We address the presence of a second-order nonlinearity and phase matching, involving an initial, power-dependent build-up, to the coherent photogalvanic effect. The effect, via the third-order nonlinearity and multiphoton absorption leads to a spatially patterned charge separation, which generates a spatially periodic, semi-permanent, DC-field-induced second-order susceptibility with a period that is appropriate for quasi-phase matching. The maximum measured second-harmonic conversion efficiency amounts to 0.4% in a waveguide with 0.9 × 1 µm 2 cross section and 36 mm length, corresponding to 53 µW at 532 nm with 13 mW of IR input coupled into the waveguide. The maximum equivalent χ (2) -susceptibility amounts to 3.7 pm/V, as retrieved from the measured conversion efficiency.
We present an integrated hybrid semiconductor-dielectric (InP-Si 3 N 4) waveguide laser that generates frequency combs at a wavelength around 1.5 µm with a record-low intrinsic optical linewidth of 34 kHz. This is achieved by extending the cavity photon lifetime using a low-loss dielectric waveguide circuit. In our experimental demonstration, the on-chip, effective optical path length of the laser cavity is extended to 6 cm. The resulting linewidth narrowing shows the high potential of on-chip, highly coherent frequency combs with direct electrical pumping, based on hybrid and heterogeneous integrated circuits making use of low-loss dielectric waveguides.
Abstract:We present a detailed analysis of a semiconductor hybrid laser exploiting spectral control from an external photonic waveguide circuit that provides frequency-selective feedback. Based on a spatially resolved transmission line model (TLM), we have investigated the output power, emission frequency, and the laser spectral linewidth. We find that, if the feedback becomes weaker, the spectral linewidth is larger than predicted by previous models that are based on a modified mean-field approximation, even if these take a strong spatial variation of the gain into account. The observed excess linewidth is caused by additional index fluctuations that are associated with strong spatial gain variations.
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