The "wave-guide" model1,2,3,4,5, which can be used to study the light scattering problem in optical alignment, has been extended to include illumination with arbitrary polarization and large numerical aperture (NA) lens. An existing simulator4 has been enhanced to calculate the images of different structures observed under different alignment schemes. It is shown that variations in the polarization conditions and topography may drastically alter the alignment results.
Undeveloped and unbaked paterns or latent images (LI) in polymethylmethacrylate (PMMA) have been observed and measured using different measurement techniques. Results from two common-path baseband optical techniques have been compared with the results of profiling LI using an atomic force probe. These results indicate that 5 Å detection limits in optical path length measurements are easily achievable at near video rates using simple optical systems.
Utilizing the Korringa-Kohn-Rostoker method, we present straightforward procedures for efficiently parametrizing experimental Fermi-surface data. Useful techniques, derived from standard least-squares methods, are generated for fitting areas, cyclotron effective masses, and pressure derivatives of areas, using as adjustable parameters, phase shifts, energy derivatives of phase shifts, and lattice-constant derivatives of phase shifts, respectively. We apply these techniques to recent noble-metal Fermi-surface data and demonstrate that the quality of fit for the above quantities is highly insensitive to the assumed value of the energy parameter used in the formalism.
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