We present a comprehensive study of a magnetic sensor system that benefits from a new technique to substantially increase the magnetoelastic coupling of surface acoustic waves (SAW). The device uses shear horizontal acoustic surface waves that are guided by a fused silica layer with an amorphous magnetostrictive FeCoSiB thin film on top. The velocity of these so-called Love waves follows the magnetoelastically-induced changes of the shear modulus according to the magnetic field present. The SAW sensor is operated in a delay line configuration at approximately 150 MHz and translates the magnetic field to a time delay and a related phase shift. The fundamentals of this sensor concept are motivated by magnetic and mechanical simulations. They are experimentally verified using customized low-noise readout electronics. With an extremely low magnetic noise level of ≈100 pT/, a bandwidth of 50 kHz and a dynamic range of 120 dB, this magnetic field sensor system shows outstanding characteristics. A range of additional measures to further increase the sensitivity are investigated with simulations.

We present an analytical and experimental study on low-noise piezoelectric thin film resonators that utilize the delta-E effect of a magnetostrictive layer to measure magnetic fields at low frequencies. Calculations from a physical model of the electromechanical resonator enable electrode designs to efficiently operate in the first and second transversal bending modes. As predicted by our calculations, the adapted electrode design improves the sensitivity by a factor of 6 and reduces the dynamic range of the sensor output by 16 dB, which significantly eases the requirements on readout electronics. Magnetic measurements show a bandwidth of 100 Hz at a noise level of about 100 pTHz-0.5

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Magnetoelectric thin film composites have demonstrated their potential to detect sub-pT magnetic fields if mechanical resonances (typically few hundred Hz to a few kHz) are utilized. At low frequencies (1–100 Hz), magnetic field-induced frequency conversion has enabled wideband measurements with resonance-enhanced sensitivities by using the nonlinear characteristics of the magnetostriction curve. Nevertheless, the modulation with a magnetic field with a frequency close to the mechanical resonance results in a number of drawbacks, which are, e.g., size and energy consumption of the sensor as well as potential crosstalk in sensor arrays. In this work, we demonstrate the feasibility of an electric frequency conversion of a magnetoelectric sensor which would overcome the drawbacks of magnetic frequency conversion. This magnetoelectric sensor consists of three functional layers: an exchange biased magnetostrictive multilayer showing a high piezomagnetic coefficient without applying a magnetic bias field, a non-linear piezoelectric actuation layer and a linear piezoelectric sensing layer. In this approach, the low frequency magnetic signal is shifted into the mechanical resonance of the sensor, while the electric modulation frequency is chosen to be either the difference or the sum of the resonance and the signal frequency. Using this electric frequency conversion, a limit of detection in the low nT/Hz1/2 range was shown for signals of low frequency.

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Delta-E effect sensors are based on magnetoelectric resonators that detune in a magnetic field due to the delta-E effect of the magnetostrictive material. In recent years, such sensors have shown the potential to detect small amplitude and low-frequency magnetic fields. Yet, they all require external magnetic bias fields for optimal operation, which is highly detrimental to their application. Here, we solve this problem by combining the delta-E effect with exchange biased multilayers and operate the resonator in a low-loss torsion mode. It is comprehensively analyzed experimentally and theoretically using various kinds of models. Due to the exchange bias, no external magnetic bias fields are required, but still low detection limits down to $${{\text{350 pT}} \mathord{\left/ {\vphantom {{\text{350 pT}} {\sqrt {{\text{Hz}}} }}} \right. \kern-\nulldelimiterspace} {\sqrt {{\text{Hz}}} }}$$ 350 pT / Hz at 25 Hz are achieved. The potential of this concept is demonstrated with a new operating scheme that permits simultaneous measurement and localization, which is especially desirable for typical biomedical inverse solution problems. The sensor is localized with a minimum spatial resolution of 1 cm while measuring a low-frequency magnetic test signal that can be well reconstructed. Overall, we demonstrate that this class of magnetic field sensors is a significant step towards first biomedical applications and compact large number sensor arrays.