This study uses a micro-electromechanical
system (MEMS) structure
to fabricate a cupric oxide (CuO) nanosheet (NS) gas sensor. A CuO-NS
with a size ranging from 100 to 500 nm is produced by chemical synthesis
and ultrasonic wave grinding. The sensor is used to detect 50 ppb
of NO2 at various temperatures. The result indicates a
temperature-dependent sensing behavior to NO2 in a CuO
sensor. It exhibits abnormal n-type behavior at lower temperatures,
with a transition to p-type at higher temperatures. The mechanism
for this behavior is proposed.
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