Multilayer lifetime has emerged as one of the major issues for the commercialization of extreme-ultraviolet lithography (EUVL). We describe the performance of an oxidation-resistant capping layer of Ru atop multilayers that results in a reflectivity above 69% at 13.2 nm, which is suitable for EUVL projection optics and has been tested with accelerated electron-beam and extreme-ultraviolet (EUV) light in a water-vapor environment. Based on accelerated exposure results, we calculated multilayer lifetimes for all reflective mirrors in a typical commercial EUVL tool and concluded that Ru-capped multilayers have approximately 40x longer lifetimes than Si-capped multilayers, which translates to 3 months to many years, depending on the mirror dose.
Abstract:The LCLS hard x-ray Free Electron Laser at SLAC reported first lasing in April of 2009. Since then two successful user runs have been completed at the two soft x-ray stations. The first hard x-ray station has started commissioning in July of 2010. Beam diagnostics play an essential role for tuning the machine and delivering the requested beam properties to the users. An overview of the LCLS photon diagnostics will be presented including some selected commissioning results. Plans for future improvements and upgrades will be briefly discussed.
Abstract. The Solar Ultraviolet Imager (SUVI) is one of the several instruments that will fly on board the next generation of Geostationary Operational Environmental Satellites R-U platforms, as part of the National Oceanic and Atmospheric Administration's space weather monitoring fleet. SUVI is a generalized Cassegrain telescope that employs multilayer-coated optics that operate in six extreme ultraviolet (EUV) narrow bandpasses centered at 93.9, 131.2, 171.1, 195.1, 284.2 and 303.8 Å. The innovation of the design is that SUVI is the first EUV solar telescope that has six different wavelength channels accommodated on each mirror. And despite having six segmented multilayer-coatings, shadowing (due to the mask) is minimized allowing SUVI to exceed its effective area specifications. Once operational, SUVI will record full-disk, spectroheliograms every few minutes, where this data will be used to better understand the effects of solar produced EUV radiation on Earth and the near-Earth environment. The material presented discusses general aspects of the SUVI optical design, mirror fabrication, super polishing, and metrology carried out to verify optical surface quality and in-band, EUV reflectivity performance of the multilayer coatings. The power spectral density and EUV measurements are shown to exceed performance requirements and are critical for the overall calibration and monitoring of SUVI's throughput and imaging performance, once operational.
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