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Two schemes of nucleation and growth of gallium nitride on Si(111) substrates are investigated and the structural and electrical properties of the resulting films are reported. Gallium nitride films grown using a 10–500 nm-thick AlN buffer layer deposited at high temperature (∼1050 °C) are found to be under 260–530 MPa of tensile stress and exhibit cracking, the origin of which is discussed. The threading dislocation density in these films increases with increasing AlN thickness, covering a range of 1.1 to >5.8×109 cm−2. Films grown using a thick, AlN-to-GaN graded buffer layer are found to be under compressive stress and are completely crack free. Heterojunction field effect transistors fabricated on such films result in well-defined saturation and pinch-off behavior with a saturated current of ∼525 mA/mm and a transconductance of ∼100 mS/mm in dc operation.

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Donor impurity excitation spectra in the infrared from two high-quality, not-intentionally doped, hydride-vapor-phase epitaxial GaN wafers are reported. Two previously observed shallow donors which we designate N1 and N2 were observed in both wafers. However, spectra of one wafer are dominated by N1 and spectra of the other by N2. A comparison of infrared and secondary ion mass spectroscopic data allows identification of N1 as Si and N2 as O. Silicon is the shallowest uncompensated donor in these samples with an activation energy of 30.18±0.1 meV in the freestanding Samsung wafer. The activation energy of O is found to be 33.20±0.1 meV. An unidentified third donor with an activation energy of 31.23±0.1 meV also was observed. Integrated absorption cross sections are found to be 8.5×10−14 cm for Si and 8.6×10−14 cm for O.

This paper presents the homoepitaxial growth of phase pure (010) β-Ga2O3 thin films on (010) β-Ga2O3 substrate by low pressure chemical vapor deposition. The effects of growth temperature on the surface morphology and crystal quality of the thin films were systematically investigated. The thin films were synthesized using high purity metallic gallium (Ga) and oxygen (O2) as precursors for gallium and oxygen, respectively. The surface morphology and structural properties of the thin films were characterized by atomic force microscopy, X-ray diffraction, and high resolution transmission electron microscopy. Material characterization indicates the growth temperature played an important role in controlling both surface morphology and crystal quality of the β-Ga2O3 thin films. The smallest root-mean-square surface roughness of ∼7 nm was for thin films grown at a temperature of 950 °C, whereas the highest growth rate (∼1.3 μm/h) with a fixed oxygen flow rate was obtained for the epitaxial layers grown at 850 °C.

Cathodoluminescence real-color imaging and spectroscopy were employed to study the properties of Ga(2)O(3) nanowires grown with different Sn/Ga ratios. The structures grown under Sn-rich conditions show large spectral emission variation, ranging from blue to red, with a green transition zone. Spectral emission changes correlate with changes in the chemical composition and structure found by energy dispersive spectroscopy and electron diffraction. A sharp transition from green to red emission correlates with a phase transition of beta-Ga(2)O(3) to polycrystalline SnO(2). The origin of the green emission band is discussed based on ab initio calculation results.

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Free and bound exciton fine structures in AlN epilayers grown by low-pressure metalorganic vapor phase epitaxyCathodoluminescence experiments were performed on a high-quality AlN epitaxial film grown by organometallic vapor phase epitaxy on a large single crystal AlN substrate. The low-temperature near-bandedge spectra clearly show six very narrow lines. The thermal quenching behavior of these emission lines provides insight on how to assign them to free and bound exciton recombination processes. The binding energy for the free-exciton-A in AlN was found to be nearly twice that in GaN. The observation of the free-exciton-A first excited state permitted us to estimate its reduced effective mass and, by using recent reported values for the hole effective mass in Mg-doped AlN, the electron effective mass in AlN has been deduced.