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A thin film lead zirconate titanate Pb(Zr,Ti)O 3 (PZT), energy harvesting MEMS device is developed to enable self-supportive sensors for in-service integrity monitoring of large social and environmental infrastructures at remote locations. It is designed to resonate at specific frequencies of an external vibrational energy source, thereby creating electrical energy via the piezoelectric effect. Our cantilever device has a PZT/SiN x bimorph structure with a proof mass added to the end. The Pt/Ti top electrode is patterned into an interdigitated shape on top of the sol-gel-spin coated PZT thin film in order to employ the d 33 mode. The base-shaking experiment at the first resonant frequency of the cantilever (170 × 260 μm) generates 1 μW of continuous electrical power to a 5.2 M resistive load at 2.4 V DC. The effect of proof mass, beam shape and damping on the power generating performance are modeled to provide a design guideline for maximum power harvesting from environmentally available low frequency vibrations. A spiral cantilever is designed to achieve compactness, low resonant frequency and minimum damping coefficient, simultaneously.

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This work discusses the effect of gas mixing ratio on the HBr/X ( X=Ar , He, or normalN2 ) plasma parameters, steady-state densities, and fluxes of active species in the planar inductively coupled plasma reactor. The investigation combined plasma diagnostics by Langmuir probes and a global (zero-dimensional) plasma model with Maxwellian approximation for the electron energy distribution function. The dilution of HBr by Ar results in a maximum effect on the HBr electron impact dissociation kinetics and provides a favorable condition for an ion-assisted chemical reaction.

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