We propose a micro rate gyroscope (MRG) based on the surface acoustic wave (SAW) gyroscopic effect for extremely high-shock military applications. We not only derived theoretically the SAW gyroscopic gain factor in a ST-cut quartz by introducing a wave velocity ratio and the perturbation method, but also verified this gain factor by experiment. The proposed SAWMRG, which consists of two delay-line oscillators, operates as a differential scheme. To estimate an inherent insertion loss, we adopted the equivalent circuit model in the design process of the delay line. The 9 × 9 mm2 SAWMRG was fabricated on a ST-cut quartz and loaded into a specially designed low temperature co-fired ceramic (LTCC) package to ensure good RF characteristics. The center frequency and the insertion loss of the delay line are measured at 98.6 MHz and 15.2 dB, respectively. We evaluated the performance of the SAWMRG, using a rate table and stochastic noise analysis, revealing a sensitivity of 0.431 Hz deg−1 s−1 in the angular rates up to 2000 deg s−1 and a white noise of 0.55 deg s−1 Hz−1/2, respectively. Consequently the feasibility of the proposed SAWMRG was verified through a set of performance evaluations, confirming the theoretical predictions.
A micro rate sensor (MRS) using a SAW oscillator is proposed for extremely high shock military applications. It is based on the SAW gyroscopic effect and consists of a pair of delay-line oscillators for a differential operating scheme. The SAW gyroscopic gain factor in ST-cut quartz not only is derived theoretically but also is verified by experiment. The 9×9 mm 2 SAWMRS was fabricated and loaded into a specially designed LTCC (Low Temperature Co-fired Ceramic) package. We evaluated the performance of the SAWMRS, using a rate table, revealing a sensitivity of 0.431 Hz/deg/s in the angular rates up to 2,000 deg/s and a white noise of 0.55 deg/s/√Hz, respectively. Consequently, the feasibility of the proposed SAWMRS was verified, through a set of performance evaluations, confirming the theoretical predictions.
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