The surfactant-mediated shape evolution of titanium dioxide anatase nanocrystals in nonaqueous media was studied. The shape evolves from bullet and diamond structures to rods and branched rods. The modulation of surface energies of the different crystallographic faces through the use of a surface selective surfactant is the key parameter for the shape control.
The authors investigated a contrast enhancement behavior of hydrogen silsesquioxane ͑HSQ͒ in a salty development system ͑NaOH / NaCl͒. Time-resolved analysis of contrast curves and line-grating patterns were carried out to investigate the unique properties of a salty development process. In NaOH developer without salt, the development process was saturated beyond a certain development time. On the other hand, the addition of salt enabled a continuous development, which was not observed in the pure NaOH development. The continuous thinning process enhances the contrast of HSQ in the salty developer, which allows a fast collapsing behavior in HSQ line-grating patterns. During development process, salt seems to have the role of modifying HSQ by breaking network bonds preferentially, leading to a continuous development rate.
Novel organosilicate polymer e-beam resists are reported, which show significantly improved e-beam sensitivity and long-term stability over those of conventional hydrogen silsesquioxane (HSQ) while maintaining its high resolution capability and good line-edge roughness. The improvement is made possible by incorporating norbornene groups in the organic moiety of organosilicate polymers, and the responsible mechanism is proposed.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.