Efforts were made to obtain anisotropic thin-film magnets at low substrate temperature. This is an important criterion for practical applications such as to build motors. The influence of substrate materials as well as film thickness on the c-axis orientation were studied. It has been shown that thin-film magnets with the easy axis of magnetization normal to the film plane could be deposited at a substrate temperature of around 450 °C by choosing the composition near the line from Nd13Fe76B11 to Nd13Fe70B17 in the ternary phase diagram. It was found that the anisotropic film magnets could be also deposited on the metallic substrate. The c-axis orientation tended to be isotropic with an increase in film thickness. The obtained results were used to fabricate a milli-size motor by depositing 20-μm-thick Nd–Fe–B films on a silicon steel disk substrate of 5-mm diam. The milli-size motor exhibited a torque of 0.8 g mm at a rotational speed of 3000 rpm.
Isotropic Nd-Fe-B thick film magnets were prepared by a high-speed pulsed laser deposition method followed by a post annealing. The deposition rate of 90 m/h could be successfully achieved, and a pulse annealing was adopted as the post annealing process in order to enhance coercivity. Use of a substrate heating system under the high deposition rate enabled us to obtain anisotropic thick films with ( ) max of approximately 120 kJ/m 3 , which show the potential for an improvement in the properties of the micromachines. Novel micromachines comprising the isotropic films were introduced.
Articles you may be interested inEffect of surface domain structure on wall mobility in amorphous microwires J. Appl. Phys. 105, 07A310 (2009); 10.1063/1.3068481Magneto-optical investigation of high-frequency electric current influence on surface magnetization reversal in Co-rich amorphous microwires
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.