The figure of merit ZT is measured by a Harman method on simple devices prepared on single thermoelectric layers of different thicknesses. The thermoelectric layers are prepared at different conditions by laser ablation from Bi2Te3 target. The best measured figure of merit ZT is for our devices ZT=2.65. This result is comparable with the results obtained on superlattices. ZT oscillated with the thickness of the layers. On some devices the Seebeck coefficient is measured and using conductivity measurements along the thermoelectric layers the thermal conductivity is estimated from ZT. The low thermal conductivity of samples is explained by the quantum size effect and by existence of few phases of type Bi2(m+n)Te3n in the thermoelectric layers.

The properties of thin thermoelectric layers (about 60 nm in thickness) prepared by pulsed laser deposition are presented. Hot pressed targets were made from “middle” temperature range thermoelectric bulk materials with the potential high figure of merit ZT. P-type and N-type layers were prepared from Yb0.19Co4Sb12 and Ce0.1Fe0.7Co3.3Sb12 targets, respectively. The thin films were deposited on quartz glass substrates using KrF excimer laser. The individual layers were prepared by applying different laser beam energy densities (2 or 3 J cm−2) at several substrate temperatures (200, 250, or 300 °C). Crystallinity and composition of the layers were examined by x-ray diffraction and wavelength dispersive analysis, respectively. Homogeneity of Yb across a surface of the Yb filled film was explored by secondary ion mass spectrometry. The thermoelectric properties, the Seebeck coefficient, the electrical resistivity, and the power factor, for the best prepared P and N layer are presented in the temperature range from 300 to 500 K.

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