The atomic structure of Si(113) has been studied by using time-of-flight coaxial impact collision ion scattering spectroscopy (ToF-CAICISS) and reflection high-energy electron diffraction (RHEED). The RHEED observations showed two ordered phases of 3 × 2 and 3 × 1. A phase transition of 3 × 2 to 3 × 1 was observed to occur reversibly in a temperature range of 450-550• C. From the CAICISS measurements, it was found that the intensity variations of the 3 × 2 phase are most probably consistent with the 3 × 1 phase and they are almost symmetric on [332], suggesting a geometrical similarity in the local atomic structure between the two reconstructions. It turned out that two reconstructions have top surface atoms with arrangement along [110], probably forming a unit of five atoms having a dimer as in previously reported structural models. The interatomic distance or bond length between the top surface atoms was determined. In particular, it was found that the dimer is positioned slightly lower than the other two top surface atoms. From these results, the atomic structure of Si (113) is discussed on the basis of previously reported structural models, including the unit of five atoms and the adatoms.
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