Silicon wafer thinning process is meeting great challenges to fulfill requirements of ultra-thin IGBT for automotive applications. Chemo-mechanical grinding (CMG) process is potentially emerging stress relief thinning process which combines the advantages of fixed abrasive machining and chemical mechanical polishing (CMP). A major issue in CMG of Si wafers is the relatively low material removal rate (MRR). This paper studies the influence of the wheel specifications and grinding conditions on the MRR of CMG. Two sets of three-factor two-level full factorial designs of experiment (DOE)[1] are employed to reveal the main effects and interacted effects of CMG wheel specifications and grinding parameters on MRR. The optimal combination scenarios for improving MRR of CMG are analysized and obtained. By use of the optimal CMG wheel and grinding parameters, the MRR of more than 60nm/min is achieved.
Chemo-mechanical grinding (CMG) process is a promising process for large-sized Si substrate fabrication at low cost. An encountered issue in current CMG process of Silicon (Si) wafers is metallic contaminations on ground Si wafer surface, which is attributed to the existence of sodium carbonate in wheel compounds. In this paper, four different CMG wheels were developed and grinding experiments were conducted to study the effects of exclusion of sodium carbonate and concentration of ceria abrasive on grinding performance. The grinding characteristics of the four wheels were analysized and discussed to reveal the effects of different compositions.
The purpose of this study was to investigate the difference in oxygen evolution and reduction reaction activity by changing the preparation conditions of Fe-Ni-W alloy plating. We produced Fe-Ni-W alloy plating that changed the concentration of Fe and W ions in the bath. It was described that the activity for oxygen evolution reaction (OER) depended on the containing W amount in the film, and also depended on the concentration of complex agent, Na3Cit・2H2O in the bath. When the concentration of Na3Cit・2H2O in the bath increased, the content of Fe-W in the film increased, and the Ni content decreased. It was found that the plated electrode with morphological large surface area showed good performance. In the case of oxygen reduction reaction (ORR), it was described that the activity depended on the contents of W in the film.
This study was aimed at the preparation of an electrode for Zinc-air battery, which had excellent catalytic activity by use of electroplating of alloys made of abundant metal, such as Fe and Ni. The oxygen overvoltage of the Fe-Ni-W alloy plated electrode was the smallest through the measurement. The elemental composition and the enlargement of the surface area were confirmed by SEM and EDX analysis. Involvement of Fe and W of Fe-Ni-W alloy plated electrode will be one factor for its high catalytic activity. Thus plated Fe-Ni-W alloy electrodes were compared with other Fe alloy plated electrodes considering to their cathode performance as Zinc-air battery. The catalytic activity of Fe-Ni-W plated electrode showed the best performance comparing to Fe-Ni alloy plated electrodes as cathode for Zinc-air battery. Also comparing to the platinum electrode which had been widely used as cathode in the field of Zinc-air battery, the Fe-based alloy plated electrode showed better performance as the electrodes considering to its oxygen evolution reaction.
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