This paper is the first to report on a new analytic model for predicting microcontact resistance and the design, fabrication, and testing of microelectromechanical systems (MEMS) metal contact switches with sputtered bimetallic (i.e., gold (Au)-on-Au-platinum (Pt), (Au-on-Au-(6.3at%)Pt)), binary alloy (i.e., Aupalladium (Pd), (Au-(3.7at%)Pd)), and ternary alloy (i.e., Au-Pt-copper (Cu), (Au-(5.0at%)Pt-(0.5at%)Cu)) electric contacts. The microswitches with bimetallic and binary alloy contacts resulted in contact resistance values between 1-2Omega. Preliminary reliability testing indicates a 3times increase in switching lifetime when compared to microswitches with sputtered Au electric contacts. The ternary alloy exhibited approximately a 6times increase in switch lifetime with contact resistance values ranging from approximately 0.2-1.8Omega SECTION I. Introduction Microelectromechanical systems (MEMS) switches are paramount in importance for the future miniaturization of radio frequency (RF) systems. Space-based radar, phased array radar, and phase shifters all depend on reliable switching between RF loads. Because of their small geometries, exceptional RF performance, and low power consumption, MEMS contact switches are ideally suited for these applications. 1 The devices used in this study are illustrated in Fig. 1.
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ABSTRACTRectangular-coaxial (recta-coax) transmission lines fabricated through a three-dimensional micromachining process are presented. These lines are shown to have significant advantages over competing integrated transmission lines such as microstrip and coplanar waveguides. Design equations are presented for impedance, loss, and frequency range. The equations are confirmed with simulations and measurements. The quality factor of shorted lambda/4 resonators is measured to be 156 at 60 GHz. This corresponds to a line loss of 0.353 dB/cm. Advantages of these lines for passive millimeter-wave circuits including ease of signal routing, high isolation, and signal crossovers are demonstrated with realized lines and couplers.
SUBJECT TERMSCoplanar waveguides, couplers, filters, microstrip, millimeter-wave circuits, resonators
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