The complex dielectric functions (hω) from 0.74 to 6.6 eV of pseudomorphically strained Si 1−y C y (0 < y < 0.014) alloys grown on Si (0 0 1) were determined using spectroscopic ellipsometry. Interference effects due to surface overlayers and multiple reflections at the substrate/epilayer interface were subtracted. We also report the critical-point parameters (amplitude, energy, broadening, phase angle and dimension) of the E 0 , E 1 , E 2 and E 1 interband transitions. While the E 1 energy gap increases linearly with increasing C content, in good agreement with a continuum elasticity model (taking into account the effects of biaxial stress and alloying with C based on a linear interpolation of the Si and diamond E 1 energies), the E 0 gap stays approximately constant and the E 2 gap shows a significant decrease. The amplitudes of all critical points decrease by about 50% and the broadenings increase by about 50-80% when adding 1.4% C. The phase angles remain approximately the same as in Si, except for E 1 . The changes in the critical-point parameters can be understood due to the lattice relaxation (four Si nearest neighbours move towards C) and the strong alloy scattering, with obvious implications for ultrafast or high-field electronic transport in such alloys. Since the Si 1−y C y alloys are under a tensile biaxial stress, the measured ordinary dielectric function is also affected by piezo-optical effects, which were calculated using literature data for bulk Si.
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