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Holes 20 Å diameter and lines 20 Å wide can be cut in sodium β-alumina, sodium β″ alumina, lithium β-alumina, potassium β-alumina, lead β-alumina, and silver β-alumina using a small focused electron probe (approximately 104 A/cm2). Drilling can proceed along any crystal direction in the specimen and can penetrate material more than 1000 Å thick maintaining the small (20 Å) diameter. The holes and lines remain stable and the specimen can be removed from the electron microscope and replaced later for further drilling or examination at reduced beam intensities.