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Monte Carlo simulations have been used to study the influence of the magnetic field on ion impact at the cathode surface of a sputtering magnetron discharge. The ion parameters (energy, incident angle at the cathode and transit time) have been investigated under four magnetic field strengths and two pressures (1 and 10 Pa). It has been confirmed that the magnetic field has little influence on ion motion. Also, it was found that the magnetic field's influences on ion parameters are given through its influence on electron motion, namely on the ionization site, which is most important in determining the ion energy and transit time. It is proposed that, taking into consideration both the ion energy and the transit time, the appropriate ionization site is the edge of the cathode fall region.

In this paper, argon was used in radio frequency (13.56 MHz) dielectric barrier discharge (rf-DBD) at atmospheric pressure. The IV curve was recorded after gas breakdown, and discharge photos were captured by ICCD camera. Discharges of α mode and γ mode were observed based on IV curve and ICCD photos. As the existence of negative glow in γ mode, the luminescence intensity of different position of the discharge gap was analyzed. It was found that in the α mode, the electron avalanche occurs from negative to positive and negative glow appeared after the discharge changed into γ mode. In every half cycle, the peak position of negative glow is 13 ± 1 ns later than that of electron avalanche on cathode surface.

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