Abstract.A two-temperature thermal non-equilibrium model is developed and applied to the threedimensional and time-dependent simulation of the flow inside a DC arc plasma torch. A detailed comparison of the results of the non-equilibrium model with those of an equilibrium model is presented. The fluid and electromagnetic equations in both models are approximated numerically in a fully-coupled approach by a variational multi-scale finite element method. In contrast to the equilibrium model, the non-equilibrium model did not need a separate reattachment model to produce an arc reattachment process and to limit the magnitude of the total voltage drop and arc length. The non-equilibrium results show large non-equilibrium regions in the plasma -cold-flow interaction region and close to the anode surface. Marked differences in the arc dynamics, especially in the arc reattachment process, and in the magnitudes of the total voltage drop and outlet temperatures and velocities between the models are observed. The non-equilibrium results show improved agreement with experimental observations.

A theofetical model has been formulated describing the influence of the arc condition and the cathode material and geometry on arc cathode erosion. To arrive at a self-consistent description for the entire arc cathode attachment region, a realistic onedimensional sheath model has been used. This sheath model is supplemented by an integral energy balance of the ionization zone between the sheath and the arc, and by a differential energy balance of the cathode. For the case of a tungsten cathode in an argon arc, it h a s been shown that the ion current density is almost 50% of the total current density at low arc currents, while it decreases to about 18% of the total cunent density and the thermionic electron current density increases to about 82% of the total current density at high currents. It has also been found that heat conduction within the cathode and radiation from the cathode surface control energy transport from the cathode spot at low currents, and that dissipation by thermionic electron release dominates at high currents.

Excimer emission at 172 nm was observed from xenon discharges generated between a perforated anode, with opening dimensions in the sub-millimetre range, and a planar cathode. A thin dielectric layer 100–250 µm in thickness, with the same size opening as the anode, is aligned with the anode opening and used to separate the electrodes. Devices with this structure are referred to as cathode boundary layer (CBL) discharge or micro-hollow cathode discharge devices, depending on the surface structure of the cathode. The emission intensity and efficiency of these devices are pressure- and current-dependent. Typical power densities and internal efficiencies (ratio of excimer radiant power to electrical input power) are 0.5–1.5 W cm−2 and 3–5%, respectively. In the current range between normal and abnormal mode operation, the CBL discharge shows regularly arranged filaments (self-organization). Optimum emission of the excimer radiation is observed at the transition from the normal glow mode to self-organization. The resistive current–voltage characteristic in the self-organization region allows the operation of multiple CBL devices in parallel without individual ballast, but with an excimer emission slightly off the maximum value. The measured decrease of the excimer emission to about 10% of its initial value after approximately 250 h of continuous operation seems to be caused by the increasing contamination of xenon, through minor leaks in the discharge chamber and/or the outgassing of chamber components. Refilling the chamber with fresh gas after such an extended operation resulted in full recovery of the discharge with respect to excimer emission. The results suggest the possibility of generating extended lifetime, intense, large area, planar excimer sources using CBL discharges in sealed discharge chambers including getters.

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