High-T c Josephson junctions were successfully fabricated by focused ion beam (FIB) direct milling. The characteristics of the junction barrier were carefully controlled by tuning the thickness of the link region. The optimal remaining thickness for the YBCO is about 70-80 nm even though the YBCO thicknesses are different. The temperature-dependence of the critical current provides good evidence of the superconductor-normal-superconductor weak link of the junctions. Although the flux-flow behavior increasingly dominates at lower temperatures, the voltage-current shows resistively shunted junction-like characteristics at temperatures close to T c . The Shapiro steps of a single junction irradiated with microwaves were measured, revealing strong Josephson effects in ion-damaged junctions. This method will be of great benefit to nanoSQUIDs for the detection of spin systems.
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