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Deposition of SiOx layers by low‐pressure microwave plasmas is an excellent means to add missing barrier functionalities to cheap and material‐saving homo‐polymeric materials that will increasingly replace expensive multi‐layer polymer food packaging. SiOx coatings were deposited in an ECR plasma process on polyethyleneterephthalate (PET) foils using two different precursors, HMDSO and HMDSN. O2 transition rates of less than 1 cm3 (m−2·24 h−1·bar−1) were obtained for the best performing SiOx coatings deposited from O2/HMDSN gas mixtures. First ECR plasma deposition tests on polypropylene (PP) trays show the high barrier potential of SiOx coatings even on three‐dimensional polymer food packaging.

Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII, San Francisco, CA, FEB 04-07, 2013International audienceThe development of organic electronic requires a non contact digital printing process. The European funded e-LIFT project investigated the possibility of using the Laser Induced Forward Transfer (LIFT) technique to address this field of applications. This process has been optimized for the deposition of functional organic and inorganic materials in liquid and solid phase, and a set of polymer dynamic release layer (DRL) has been developed to allow a safe transfer of a large range of thin films. Then, some specific applications related to the development of heterogeneous integration in organic electronics have been addressed. We demonstrated the ability of LIFT process to print thin film of organic semiconductor and to realize Organic Thin Film Transistors (OTFT) with mobilities as high as 4 10(-2) cm(2).V-1.s(-1) and I-on/I-off ratio of 2.8 10(5). Polymer Light Emitting Diodes (PLED) have been laser printed by transferring in a single step process a stack of thin films, leading to the fabrication of red, blue green PLEDs with luminance ranging from 145 cd.m(-2) to 540 cd.m(-2). Then, chemical sensors and biosensors have been fabricated by printing polymers and proteins on Surface Acoustic Wave (SAW) devices. The ability of LIFT to transfer several sensing elements on a same device with high resolution allows improving the selectivity of these sensors and biosensors. Gas sensors based on the deposition of semiconducting oxide (SnO2) and biosensors for the detection of herbicides relying on the printing of proteins have also been realized and their performances overcome those of commercial devices. At last, we successfully laser-printed thermoelectric materials and realized microgenerators for energy harvesting applications

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