The cross-integration of spin-wave and superconducting technologies is a promising method for creating novel hybrid devices for future information processing technologies to store, manipulate, or convert data in both classical and quantum regimes. Hybrid magnon–polariton systems have been widely studied using bulk Yttrium Iron Garnet (Y3Fe5O12, YIG) and three-dimensional microwave photon cavities. However, limitations in YIG growth have, thus far, prevented its incorporation into CMOS compatible technologies, such as high-quality factor superconducting quantum technology. To overcome this impediment, we have used Plasma Focused Ion Beam (PFIB) technology—taking advantage of precision placement down to the micrometer scale—to integrate YIG with superconducting microwave devices. Ferromagnetic resonance has been measured at milliKelvin temperatures on PFIB-processed YIG samples using planar microwave circuits. Furthermore, we demonstrate strong coupling between superconducting resonators and YIG ferromagnetic resonance modes by maintaining reasonably low loss while reducing the system down to the micrometer scale. This achievement of strong coupling on-chip is a crucial step toward fabrication of functional hybrid quantum devices from spin-wave and superconducting components.

Electromagnetic filtering is essential for the coherent control, operation and readout of superconducting quantum circuits at milliKelvin temperatures. The suppression of spurious modes around transition frequencies of a few GHz is well understood and mainly achieved by on-chip and package considerations. Noise photons of higher frequencies – beyond the pair-breaking energies – cause decoherence and require spectral engineering before reaching the packaged quantum chip. The external wires that pass into the refrigerator and go down to the quantum circuit provide a direct path for these photons. This article contains quantitative analysis and experimental data for the noise photon flux through coaxial, filtered wiring. The attenuation of the coaxial cable at room temperature and the noise photon flux estimates for typical wiring configurations are provided. Compact cryogenic microwave low-pass filters with CR-110 and Esorb-230 absorptive dielectric fillings are presented along with experimental data at room and cryogenic temperatures up to 70 GHz. Filter cut-off frequencies between 1 to 10 GHz are set by the filter length, and the roll-off is material dependent. The relative dielectric permittivity and magnetic permeability for the Esorb-230 material in the pair-breaking frequency range of 75 to 110 GHz are measured, and the filter properties in this frequency range are calculated. The estimated dramatic suppression of the noise photon flux due to the filter proves its usefulness for experiments with superconducting quantum systems.

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