This paper reports for the first time on the reversible electrowetting of liquid droplets in air and oil environments on superhydrophobic silicon nanowires (SiNWs). The silicon nanowires were grown on Si/SiO2 substrates using the vapor-liquid-solid (VLS) mechanism, electrically insulated using 300 nm SiO2, and hydrophobized by coating with a fluoropolymer C4F8. The resulting surfaces displayed liquid contact angle (Theta) around 160 degrees for a saline solution (100 mM KCl) in air with almost no hysteresis. Electrowetting induced a maximum reversible decrease of the contact angle of 23 degrees at 150 VTRMS in air.
We present a design for integrated lab-on-chip microsystems dedicated to mass spectrometry analysis based on the fabrication of watertight microchannels for the circulation of liquids. In this paper, we demonstrate how to fabricate complete polymer microchannels using the negative photoresist SU-8 which has the advantage of being compatible with protein analysis by mass spectrometry. Our method of fabrication requires novel technological steps involving SU-8 multi-layer processing, improved SU-8 adhesion and the use of SU-8 wafer bonding for the watertight closing of the microchannels with a Pyrex wafer. This technique also encompasses the design of various microfluidic elements such as tapered recesses for the housing of capillary tubes allowing the connection of the channels to external systems. Following this, the capillary tubes were used to test the hydrodynamic behaviour of the channels and consequently the efficiency of our technological process in achieving fully watertight structures within our flow rate and pressure specifications.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.