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Germanium and doped-germanium polycrystalline films were formed with the use of photolytic CO2 laser-induced chemical vapor deposition. The compounds which yielded germanium in large quantities were germane, ethylgermane, and diethylgermane. Triethylgermane produces germanium in trace quantities. Gas-phase reactions were monitored with the use of Fourier transform infrared spectroscopy, also used for identification of end products. Scanning electron microscopy was used for analysis of the films. The products identified on irradiation of germane were germanium and hydrogen, with conversion rates of 86%. On irradiation of diethylgermane and ethylgermane, ethylene, germane, germanium, and hydrogen were produced. Germanium films doped with cadmium and aluminum were produced successfully by the irradiation of germane mixtures containing dimethylcadmium or trimethylaluminum, respectively.

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The rotational spectrum of trimethylgermane has been recorded from 18.0 to 40.0 GHz. The ground-state rotational constants have been determined for ten different isotopic species. An rs value of 1.532 ± 0.001 Á has been determined for the GeH bond distance. With this value of the GeH distance and an assumed structure for the methyl group, the following two structural parameters were obtained: r(GeC) = 1.947 ± 0.006 Á and zCGeH = 109.3 ± 0.1°. The determined structural parameters are compared to the corresponding ones for other methyl-substituted germanes.