We introduce a micromachined force scale for laser power measurement by means of radiation pressure sensing. With this technique, the measured laser light is not absorbed and can be utilized while being measured. We employ silicon micromachining technology to construct a miniature force scale, opening the potential to its use for fast in-line laser process monitoring. Here we describe the mechanical sensing principle and conversion to an electrical signal. We further outline an electrostatic force substitution process for nulling of the radiation pressure force on the sensor mirror. Finally, we look at the performance of a proof-of-concept device in open-loop operation (without the nulling electrostatic force) subjected to a modulated laser at 250 W and find its response time is less than 20 ms with noise floor dominated by electronics at 2.5 W/√Hz.
The piezoelectric response of AlGaN/GaN circular HEMT pressure sensing device integrated on AlGaN/GaN diaphragm was experimentally investigated and supported by the finite element method modeling. The 4.2 μm thick diaphragm with 1500 μm diameter was loaded by the dynamic peak-to-peak pressure up to 36 kPa at various frequencies. The piezoelectric charge induced on two Schottky gate electrodes of different areas was measured. The frequency independent maximal sensitivity 4.4 pC/kPa of the piezoelectric pressure sensor proposed in a concept of micro-electro-mechanical system was obtained on the gate electrode with larger area. The measurement revealed a linear high performance piezoelectric response in the examined dynamic pressure range.
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