The kinetics and thermochemistry of the decomposition pathways for 1,3-disilacyclobutane (1,3-DSCB) in the gas phase were studied using the second-order Møller-Plesset (MP2) perturbation theory and coupled cluster methods with single, double, and perturbative triple excitations (CCSD(T)). The reactions examined include 2 + 2 cycloreversion to form two silenes by either a concerted or a stepwise mechanism, 1,1-, 1,2-, and 1,3-H(2) elimination, and the ring-opening initiated by 1,2-H shift to form an open-chain 1,3-disilabut-1-ylidene, which undergoes further decomposition to produce two pairs of silene/silylene species. The structures of the transition states for the concerted and the stepwise 2 + 2 cycloreversion pathways are found to resemble closely those reported for the head-to-tail and head-to-head dimerization, respectively. Comparison of the activation barriers demonstrates unambiguously that the stepwise cycloreversion (ΔH(0)(‡) = 66.1 kcal/mol) is favored over the concerted one (ΔH(0)(‡) = 77.3 kcal/mol). A new pathway was established from the 1,4-diradical intermediate in the stepwise cycloreversion to form 1-silylmethylsilene via 1,3-H shift. The concerted 1,1-H(2) elimination is shown to have the lowest activation barrier of all H2 elimination reactions. Overall, the 1,2-H shift in 1,3-DSCB with concerted ring-opening to form 1,3-disilabut-1-ylidene is the most kinetically and thermodynamically favorable decomposition pathway, both at 0 and 298 K.
The gas-phase reaction chemistry of using 1-methylsilacyclobutane (MSCB) in the hot-wire chemical vapor deposition (CVD) process has been investigated by studying the decomposition of MSCB on a heated tungsten filament and subsequent gas-phase reactions in a reactor. Three pathways exist to decompose MSCB on the filament to form ethene/methylsilene, propene/methylsilylene, and methyl radicals. The activation energies for forming propene and methyl radical, respectively, are determined to be 68.7 ± 1.3 and 46.7 ± 2.5 kJ·mol(-1), which demonstrates the catalytic nature of the decomposition. The secondary gas-phase reactions in the hot-wire CVD reactor are characterized by the competition between a free radical chain reaction and the cycloaddition of silene reactive species produced either from the primary decomposition of MSCB on the filament or the isomerization of silylene species. At lower filament temperatures of 1000-1100 °C and short reaction time (t ≤ 15 min), the free radical chain reaction is equally important as the silene chemistry. With increasing filament temperature and reaction time, silene chemistry predominates.
A method of forming crystalline tungsten carbides was
reported
by exposing the heated tungsten filament to 1,1,3,3-tetramethyl-1,3-disilacyclobutane
(TMDSCB) in a hot-wire chemical vapor deposition process. Methyl radicals
produced from the decomposition of TMDSCB on the filament serve as
the carbon source. The formation of tungsten carbides was investigated
by X-ray diffraction, cross-sectional scanning electron microscopy,
and in-situ filament resistance measurements. A pure W2C phase was formed at a high temperature of 2400 °C after 1–2
h exposure time with a growth rate of 4.4 μm min–1. The growth of the W2C layer is found to be a diffusion-controlled
process. Our study at longer deposition time of 3–4 h shows
that once the metal filament is fully carburized to form W2C, the carbon-rich WC phase starts to form on the outside layer upon
further exposure to TMDSCB. A WC layer with no contamination from
the W2C phase was found to be formed at 2400 °C and
4 h deposition time.
Oxy-cracking is a combination of oxidation and cracking reactions for converting heavy hydrocarbons into commodity products with minimal emission of CO2.
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