In the present work, an investigation of the gas and surface phase behavior of ethylene glycol (EG) pulsed discharges is presented. Infrared and optical emission spectroscopy along with time‐resolved electron temperature (Te) and electron density (ne) measurements were employed in these pulsed EG plasmas to study the dynamics of monomer fragmentation and effective chemical feedback from boundary walls. Maximized retention of monomer functionality, (CH2CH2O)n, were seen in polymer deposits when processed at low values of average power (<20 W). This preservation of monomer functionality is attributed to the increase in effective collision time between electrons and EG molecules. Presented results correlated well with proposed ethylene glycol dissociation pathways in the pulsed discharge. magnified image
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