Laser-induced periodic surface structures (LIPSS) can be fabricated in virtually all types of solid materials and show great promise for efficient and scalable production of surface patterns with applications in various fields from photonics to engineering. While the majority of LIPSS manifest as modifications of the surface relief, in special cases, laser impact can also lead to periodic modulation of the material phase state. Here, we report on the fabrication of high-quality periodic structures in the films of phase-change material Ge2Sb2Te5 (GST). Due to considerable contrast of the refractive index of GST in its crystalline and amorphous states, the fabricated structures provide strong spatial modulation of the optical properties, which facilitates their applications. By changing the excitation laser wavelength, we observe the scaling of the grating period as well as transition between formation of different types of LIPSS. We optimize the laser exposure routine to achieve large-scale high-quality phase-change gratings with controllable period and demonstrate their reversible tunability through intermediate amorphization steps. Our results reveal the prospects of fast and rewritable fabrication of high-quality periodic structures for photonics and can serve as a guideline for further development of phase-change material-based optical elements.
Periodic photonic nano- and microstructures are routinely used for light manipulation at the nanoscale. However, their fabrication process is demanding in terms of time, cost and facilities. Here we demonstrate a rapid laser-assisted method for fabrication of gratings in Ge2Sb2Te5 (GST) thin films, based on the formation of laser induced periodic surface structures (LIPSS). LIPSS formation mechanisms dependent on the wavelength of the operating laser, lead to high flexibility of the process, producing gratings with tunable period and orientation with respect to the initial laser polarization. The phase-change properties of GST, on the other hand, allows to fabricate phase gratings with strong modulation of refractive index, which are rewritable in nature.
Planar photonic structures, such as gratings and metasurfaces, are routinely used for beam steering, waveguide coupling, and light localization. However, conventional fabrication techniques that involve lithography are demanding in terms of time and cost. Much cheaper and simpler methods for surface patterning and formation of periodic surface structures are enabled by direct laser processing. Here, we demonstrate low-cost rapid fabrication of high-quality phase gratings based on the formation of laser induced periodic surface structures (LIPSS, or ripples) in Ge2Sb2Te5 (GST) thin films. Due to unique phase change properties of GST, the structures demonstrate strong modulation of refractive index with period controlled by the wavelength of laser irradiation. We study the formation of phase change LIPSS in a broad range of excitation wavelengths and observe transition between regimes with different orientations of generated ripples with respect to laser polarization.
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