The rapid growth of microelectromechanical systems ͑MEMS͒ industry has introduced a need for the characterization of thin film properties at all temperatures encountered during fabrication and application of the devices. A technique was developed to use MEMS test structures for the determination of the difference in thermal expansion coefficients ͑␣͒ between poly-Si and SiO 2 thin films at high temperatures. The test structure consists of multilayered cantilever beams, fabricated using standard photolithography techniques. An apparatus was developed to measure the thermally induced curvature of beams at high temperatures using imaging techniques. The curvatures measured were compared to the numerical model for multilayered beam curvature. The model accounts for the variation in thermomechanical properties with temperature. The beams were designed so that the values of Young's moduli had negligible effect on beam curvature; therefore, values from literature were used for E Si and E SiO 2 without introducing significant error in curvature analysis. Applying this approximation, the difference in thermal expansion coefficients between ␣ Si and ␣ SiO 2 was found to increase from 2.9ϫ10 Ϫ6 to 5.8ϫ10 Ϫ6°CϪ1 between room temperature and 900°C. These results suggest that the ␣ for poly-Si thin films may be significantly higher than values for bulk, crystalline Si.

Multilayer thin-film structures in butterfly wing scales produce a colorful iridescence from reflected sunlight. Because of optical phenomena, changes in the angle of incidence of light and the viewing angle of an observer result in shifts in the color of butterfly wings. Colors ranging from green to purple, which are due to nonplanar specular reflection, can be observed on Papilio blumei iridescent scales. This refers to a phenomenon in which the curved surface patterns in the thin-film structure cause the specular component of the reflected light to be directed at various angles while affecting the spectral reflectivity at the same time by changing the optical path length through the structure. We determined the spectral reflectivities of P. blumei iridescent scales numerically by using models of a butterfly scale microstructure and experimentally by using a microscale-reflectance spectrometer. The numerical models accurately predict the shifts in spectral reflectivity observed experimentally.

Multilayer thin-film structures in butterfly wing scales produce a colorful iridescence from reflected sunlight. Because of optical phenomena, changes in the angle of incidence of light and the viewing angle of an observer result in shifts in the color of butterfly wings. Colors ranging from green to purple, which are due to nonplanar specular reflection, can be observed on Papilio blumei iridescent scales. This refers to a phenomenon in which the curved surface patterns in the thin-film structure cause the specular component of the reflected light to be directed at various angles while affecting the spectral reflectivity at the same time by changing the optical path length through the structure. We determined the spectral reflectivities of P. blumei iridescent scales numerically by using models of a butterfly scale microstructure and experimentally by using a microscale-reflectance spectrometer. The numerical models accurately predict the shifts in spectral reflectivity observed experimentally.