Zusammenfassung: LEDs gelten als umweltfreundliche Beleuchtungstechnik. Für die Massenanwendung arbeiten die LED-Hersteller an einer Senkung der Kosten bzw. einer Erhöhung der Ausbeute, insbesondere bei der aufwendigen LED-Kristallbeschichtung auf den Wafern. Wäh-rend der Beschichtung (MOCVD) werden optische In-situMessgeräte zur Überwachung des Prozesses genutzt. Die hier vorgestellte Untersuchung beschäftigt sich mit dem Einfluss von Super-Photolumineszenz-Effekten bei einer möglichen In-situ-Prozesskontrolle in der MOCVD.Schlüsselwörter: Nitride, lichtemittierende Dioden, Super-Photolumineszenz.Abstract: LEDs are well known as environment-friendly lighting technology. The LED manufacturers are working on cost reduction and increased efficiency for mass implementation. Particularly the complex and crystalline LED layers on the wafers are critical. During the coating process (MOCVD) optical in-situ measuring instruments are used for monitoring the process. The present study investigates the influence of super-photoluminescence effects on a possible in-situ process control in the MOCVD.
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