This chapter gives a short review on dopant diffusion in germanium and specifies the underlying mechanisms of diffusion that involve the point defects. Box-shaped diffusion profiles are discussed that may be described as the phosphorus diffusion controlled by doubly ionized vacancies. In this mechanism, the diffusion coefficient depends on the electron concentration. The particulars of P and Ga diffusion profiles in the Ga-doped substrate of In 0.01 Ga 0.99 As/In 0.56 Ga 0.44 P/Ge heterostructures for multilayer solar cells are discussed. To calculate the diffusion coefficient, two methods were used: the Boltzmann-Matano (version of Sauer-Freise) and the coordinate-dependent diffusion analysis. It is established that coordinate-dependent diffusion analysis, which involves drift components together with diffusion components for diffusion profile description, is more suitable for description of the experimental profiles in such structures near p-n junction. A strong influence of intrinsic electric field on the dopant diffusivity was detected.
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