Document VersionPublisher's PDF, also known as Version of Record (includes final page, issue and volume numbers) Please check the document version of this publication:• A submitted manuscript is the author's version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. People interested in the research are advised to contact the author for the final version of the publication, or visit the DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research.• You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal ? Take down policyIf you believe that this document breaches copyright please contact us providing details, and we will remove access to the work immediately and investigate your claim. Insights into the temperature dependence of atomic layer deposition (ALD) of Pt using (methylcyclopentadienyl)trimethylplatinum, (MeCp)PtMe 3 , precursor and O 2 are presented, based on a study of reaction products by time-resolved quadrupole mass spectrometry (QMS) measurements. Above 250 • C, Pt ALD proceeds through unhindered O 2 dissociation at the Pt surface, inducing complete and instantaneous combustion of the precursor ligands. Quantification of the QMS data revealed that at 300 • C, approximately 20% of the C-atoms react during the precursor pulse, forming mainly CH 4 (∼18%) balanced by CO 2 (∼2%). The remaining 80% of the C-atoms are combusted during the O 2 pulse. Time-resolved data indicated that the combustion reactions compete with the hydrogenation reactions for the available surface carbon. Combustion reactions were found to be dominant, provided that a sufficient amount of chemisorbed oxygen is available. When the temperature drops below 250 • C, deposition becomes hindered by the presence of a carbonaceous surface layer of partially fragmented and dehydrogenated precursor ligands, formed during the precursor pulse. The carbonaceous layer limits dissociative chemisorption of O 2 and hence combustion reactions (leading to CO 2 ) whereas reduced surface reactivity also limits (de-)hydrogenation reactions (leading to CH 4 ). Below 100 • C, the carbonaceous layer fully prevents O 2 dissociation and ALD of Pt cannot proceed.

To date, conventional thermal atomic layer deposition (ALD) has been the method of choice to deposit high-quality Pt thin films grown typically from (MeCp)PtMe vapor and O gas at 300 °C. Plasma-assisted ALD of Pt using O plasma can offer several advantages over thermal ALD, such as faster nucleation and deposition at lower temperatures. In this work, it is demonstrated that plasma-assisted ALD at 300 °C also allows for the deposition of highly conformal Pt films in trenches with high aspect ratio ranging from 3 to 34. Scanning electron microscopy inspection revealed that the conformality of the deposited Pt films was 100% in trenches with aspect ratio (AR) up to 34. These results were corroborated by high-precision layer thickness measurements by transmission electron microscopy for trenches with an aspect ratio of 22. The role of the surface recombination of O-radicals and the contribution of thermal ALD reactions is discussed.

Purpose: To report on our establishment of a complete prediction model for a proton therapy delivery system exclusively used for the treatment of ocular melanoma. Method and Materials: Our ocular beamline, with a maximum range (R) of 4cm, employs a large library of range modulator wheels to deliver flat SOBPs with any R and almost any modulation width (M). We quantified the effect on the output of R, M, aperture size, off‐axis ratio, and modulator wheel design. Output measurements were obtained for an extensive set of SOBP ranges, modulation widths, and field sizes. Results: For the output model to be applicable for both partial modulation (M90

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