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High particulate matter (PM) concentrations in the cleanroom semiconductor factory have become a significant concern as they can damage electronic devices during the manufacturing process. PM can be predicted before becoming more concentrated based on its historical data to support factory management in regulating the air quality in the cleanroom. In this paper, a Multi-Dense Layer BiLSTM model is proposed to predict PM2.5 concentrations in the indoor environment of the cleanroom. To obtain reliability, validity, and interoperability data, the datasets containing temperature, humidity, PM0.3, PM0.5, PM1, PM2.5, PM5, and PM10 were retrieved in a standardized manner via oneM2M-defined representational state transfer application programmable interfaces by employing software platforms compliant with the Internet of Things (IoT) standard. Based on the proposed model, an algorithm was built providing short-term PM2.5 concentration predictions (one hour ahead, two hours ahead, and three hours ahead). The proposed model outperformed the RNN, LSTM, CNN-LSTM, and Single-Dense Layer BiLSTM models in terms of MSE, MAE, and MAPE values. The model created in this study could predict high PM2.5 concentration levels more accurately, thus providing vital support for operation and maintenance for the semiconductor industry.

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Due to the accelerated growth of the PV plant industry, multiple PV plants are being constructed in various locations. It is difficult to operate and maintain multiple PV plants in diverse locations. Consequently, a method for monitoring multiple PV plants on a single platform is required to satisfy the current industrial demand for monitoring multiple PV plants on a single platform. This work proposes a method to perform multiple PV plant monitoring using an IoT platform. Next-day power generation prediction and real-time anomaly detection are also proposed to enhance the developed IoT platform. From the results, an IoT platform is realized to monitor multiple PV plants, where the next day’s power generation prediction is made using five types of AI models, and an adaptive threshold isolation forest is utilized to perform sensor anomaly detection in each PV plant. Among five developed AI models for power generation prediction, BiLSTM became the best model with the best MSE, MAPE, MAE, and R2 values of 0.0072, 0.1982, 0.0542, and 0.9664, respectively. Meanwhile, the proposed adaptive threshold isolation forest achieves the best performance when detecting anomalies in the sensor of the PV plant, with the highest precision of 0.9517.