We developed two types of contact probe for micromeasurement. The first type -a dynamic motion probe with a probe ball 200 μm in diameter- is driven in a circle by piezoelectric (PZT) actuators at a radius of 3 μm and frequency of 10 Hz. The signal noise ratio indicates that the probe’s angle resolution is 1° and contact detection resolution of 50 nm. The second type of contact probe is static and developed for compact design. In addition to having a structure similar to earlier probes developed with a crossbeam plate, this one has a measurement ball glued to the front and back of the center plate. Optical sensors measure ball movement, which is synchronized with the contact probe. Basic experiments confirmed that the new probe has a measurement resolution of 50 nm.
The contact detection probe we propose for measuring microhole profiles uses a simple 1 DOF and optical fibers arranged in a cross-profile. When two contact balls - one on the lower end of a vertical beam and the other on the upper end - contact a microhole wall, the vertical beam rotates with the horizontal support beam at the center. An optical sensor measures measurement ball displacement, detecting contact. The probe was first balanced on a groove created to hold the probe by gravity alone. In this method, low contact force measurement is easily achieved. Based on Experimental results showed, however, that probe output was not stable with drift, failing to achieve desirable repeatability, so we glued both ends of the horizontal beamto the base. Simple contactmeasurement yielded repeatability exceeding 50 nm and resolution of 20 nm. Contact ball diameter measurement was implemented and experiments conducted to evaluate ball diameter. Testing the probe frequency response showed that the probe can scan measurement within a low 10 Hz input frequency. Profile measurement experiments and microhole diameter measurement demonstrated the effectiveness of this probe as on-machine measurement device for microholes.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.