We present an automated hairpin resonance probe for obtaining time-varying plasma electron density in a pulsed-magnetron discharge, operated with a 13.56 MHz radio-frequency source. When the resonator is placed in plasma, its characteristic resonance frequency in vacuum shifts to a higher value. From the frequency shifts, electron density is easily determined. By applying a fixed microwave frequency, the probe immersed in plasma resonates only at a specific time of the pulse waveform. At a different time of the pulse, the probe resonates at a different frequency. The procedure is automated using a Labview™ program, which increments the applied microwave frequency in small steps of the prescribed value and reads the corresponding resonance peak from an oscilloscope. The spatial and temporal electron density measured using this technique shows a sharp drop in density during the first few microseconds in the on-phase, followed by an increase in density as the discharge develops in the steady-state on-phase. The off-phase shows that decay in electron density at different rates is faster in the region where the magnetic field lines intersect the target. A quantitative model is described to explain different features observed in the experiment.
There is much scientific and commercial interest in plasma polymers to modify surface chemistry. To date, only neutral and positively charged species have been detected in the commonly applied acrylic acid plasma. Using time-averaged negative ion mass spectrometry, we demonstrate that large, negatively charged species exist in the plasma, contrary to previous studies that detected only neutral and positive species. We briefly outline how negative molecules may contribute to the deposition of plasma polymer in the acrylic acid system.
The European Space Agency has funded e2v's development of an image sensor for the visible instrument in the Euclid space telescope. Euclid has been selected for a medium class mission launch opportunity in 2020. The project aims to map the dark universe with two complementary methods; a galaxy red-shift survey and weak gravitational lensing using near infrared and visible instruments. The baseline for the visible instrument was to be the CCD203-82, which has been successfully flown on NASA's Solar Dynamics Observatory. However, to optimise the device for Euclid, e2v have designed and manufactured the CCD273-84. This device has a higher-responsivity lower-noise amplifier, enhanced red response, parallel charge injection structures and narrower registers which improve low signal charge transfer efficiency. Development models for Euclid have been manufactured with a thinner gate dielectric than standard for improved tolerance to ionising radiation. This paper describes the imager sensor in detail and focuses on the novel aspects of the device, package and interface.
This paper investigates the spatial and temporal variation in plasma electron density over a region between 5 and 10cm above the race-track region of a pulsed magnetron sputtering target. The pulse operation is performed using an asymmetric bipolar pulsed dc power supply, which provides a sequence of large negative “on-phase” voltage (−350V) and a small positive “reverse-phase” voltage (+10V) for 55% of the pulse duration (10μs). The electron density is measured using a floating microwave hairpin resonance probe. The results show electron expulsion from the target in the initial on phase, which propagates with a characteristic speed exceeding the ion thermal speed. In the steady state on phase, a consistent higher density is observed. A quantitative model has been developed to explain the resultant density drops in the initial on phase. While in the reverse phase, we observed an anomalous growth in density at a specific location from the target (d>7cm). The mechanism behind the increase in electron density has been attributed to the modulation in spatial plasma potential, which was measured earlier in the same apparatus using a floating emissive probe [J. W. Bradley et al., Plasma Sources Sci. Technol. 13, 189 (2004)].
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