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The formation and decay of high temperature phases in HxLi1−xNbO3 waveguide layers have been studied by means of waveguide mode spectroscopy and x-ray rocking curve measuring. The hydrogen doped layers with x ∼ 0.47 in (001) LiNbO3 were created by proton exchange reaction in melt benzoic acid. The high temperature phases were frozen by quenching from T = 200°C. It has been shown that these phases possess a 9% higher refractive index and 16% lower deformation in reference to the characteristic of HxLi1−xNbO3 phase equilibrium at room conditions. The relaxation of the high temperature phase to the equilibrium one has been traced at T = 100°C.

An electric field poling and domain evolution in congruent lithium niobate wafers with α phase proton exchanged channel waveguides were studied experimentally. A piezoresponse force microscopy and the study of an etching rate showed a presence of a spontaneous polarization in the waveguide region and an ability to create tailored domain structures inside the proton exchanged channel waveguides. It was shown by the in situ visualization of the domain evolution that the proton exchanged channel waveguide acted as a region with an increased value of a threshold field for domain growth.

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