During my stay in NTU, I had the previlege of working with some brilliant minds. I would rst like to thank my thesis advisor, Professor Gan Chee Lip, for accepting this novice researcher in his group and providing me with all the tools and the intellectual freedom to pursue the projects of my interest. Essentially, he had taught me how to perform research. I am greatful to Prof. Pey Kin Leong and Prof. Carl Thompson for the stimulating discussions and their valuable comments on the project. I am also greatful to my thesis committee members, Prof. Chen Zhong and Prof. Wong Chee Cheong, who have provided valuable key inputs in the early stage of my research as well as for the desertation. A very special thank to Prof Boey and Prof Subbu for their warm support for my PhD research in MSE I acknowledge the contributions from all my collaborators, especially Dr Yang Liling, Dr Yoon Seung Wook and Prof. Lee Chengkuo whom had been providing time and guidance during my two years attachment in IME. Some of the key results in this thesis will not be possible without fabrication capability of IME. Several research sta have helped me with my experiments over the course of this work. I am indebted to Mastura Aidel, Heryani Binte Ahmad, Sandy Leong, whom had made the use to be Microelectronics lab to be more alive. I would like to thank Eric Tan Jok Boon whom keeping a watchful eye in MRC lab. I also acknowledge the help from Mr Lim Poh Chong from IMRE in using XRD. I am thankfull to all my fellow in MicroE grad-room, whom I have shared many scientic and philosophical conversation over the years. In particullar, Wardhana A. Sasangka and Mr.
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