Abstract. Titanium nanolayers with the thickness of 133 nm are deposited on glass substrates at 300 K, using the deposition rates 0.1, 1.0, 1.5 and 2.0 A/s. The layers are produced with a physical vapour deposition method under high-vacuum conditions. The optical reflectance and transmittance of the layers thus produced are measured in the wavelength range of 300-1600 nm. The optical functions are calculated basing on the Kramers-Kronig relation. The relation between the optical properties of the titanium nanolayers and their nanostructure dependent on the deposition rates is investigated.
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