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An innovative approach combining chemical etching and a “lift‐off” process, which allows back contact processing after CIGSe deposition, permitted to use Au as a highly reflective back contact in ultrathin CIGSe solar cells. The Au back contact does not degrade the other parameters of the cell, as good ohmicity on CIGSe is achieved. An important photocurrent increase compared with regular Mo back contact solar cells is achieved by the enhanced light trapping effect due to the back reflector, leading to an absolute efficiency increase of +2.5% for a CIGSe thickness of 0.4 µm. This approach could be used for further investigations in improving the back side of ultrathin CIGSe solar cells. Copyright © 2012 John Wiley & Sons, Ltd.