The index inhomogeneity and the microstructure of ZrO(2) films prepared by Ar-ion-assisted deposition are investigated. The results show that as the Ar-ion momentum transferred to the growing film increases, the average refractive index increases, the vacuum-to-air spectral shift becomes almost zero, the sign of relative inhomogeneity transits from negative to positive, and the void fraction of the top layer next to air becomes smaller than that of the bottom one. These optical properties result from the improved packing density and denser outer region next to air. The Ar-ion bombardment also induces the changes in microstructure of ZrO(2) films, such as the preferential (111) orientation of cubic phase, increase in compressive stress, and reduction of surface roughness.
The effect of surface roughness onto the mirror scattering has been studied. Five kinds of substrates with different surface roughness were fabricated. On those substrates, dielectric multilayer coating for high reflectivity was deposited by ion-beam sputtering (IBS) and by electron-beam (EB) evaporation. Total integrated scattering (TIS) measurement setup was built for the evaluation of deposited samples. Most of the IBS mirrors showed lower scattering than the EB mirrors, which were deposited on the similar substrates in surface roughness. The ratio of substrate TIS to mirror TIS was defined for evaluation. It increased abruptly at approximately 2A in surface roughness, which indicated that to make low-loss mirrors, the substrate roughness should be less than 2A in rms.
Super mirror is a high reflectance mirror with very low absorption and scattering losses. We carefully measured the surface roughness of Zerodur substrate using phase shift interferometer and atomic force microscope, and compared it with the scattering of the mirror. The absorption of the mirror was measured by cavity ring-down method, and its results were correlated to the thin film structure. To avoid the UV degradation which comes from the He-Ne plasma, we carefully select the mirror fabrication material, and design the high reflectance mirror. Finally, mirror was fabricated by ion beam sputtering method and its optical properties were measured.
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