Sapphire (Al2O3 crystal) is a hard and inert material with good mechanical, optical, physical and chemical properties that plays important roles in optics and electronics. The surface quality is the key element of sapphire components especially in optical field. This paper mainly introduces four methods of ultra-precision polishing, researches based on polishing theories and slurry. It can be a conclusion that traditional polishing methods can improve material removal rate assisted by ultrasonic.
Flexure hinges are regarded as the critical components of the compliant mechanisms, its performance is one of the significant factors which could directly determine the merits and demerits of designed compliant mechanisms. So how to optimize the flexure hinges becomes the key step in designing processes of compliant mechanisms. In view of the presented importance of flexure hinges, this paper proposes a sort of multi-objective optimization method which can rapidly analyze the sensitivity and interactional laws between the performance indexes and the structural parameters of flexure hinges with the Workbench software, then to select the optimal parameters by combining with the actual working conditions of flexure hinges. Finally the finite element analysis is employed to analyze the optimization results and verify the effectiveness of proposed optimization method.
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