The design, micro-fabrication, and characterization of a resistance temperature detector (RTD) based micro sensor for minimally invasive breathing analysis and monitoring is presented. Experimental results demonstrate that the change in air temperature while inhaling and exhaling can be transduced into a time varying electrical signal, which is subsequently used to determine the breathing frequency (respiratory rate). The RTD is placed into a Wheatstone bridge to simultaneously reduce the sensor’s output noise and improve overall system accuracy. The proposed design could potentially aid health care providers in the determination of respiratory rates, which is of critical importance during the current COVID-19 pandemic.
International audienceDiamond is a promising material for future high voltage applications because of its high critical electric field. This property leads to new constraints on the used termination structure, especially in terms of electric field value. For this reason, new termination architectures based on field plate are proposed for diamond Schottky diodes. Using finite element simulations with Sentaurus TCAD (technology computer-aided design) software, a new field plate structure has been proposed. Simple variations in the classic field plate architecture were sufficient to increase the breakdown voltage from 1632 V to 2141 V at 700 K, but not to reduce the electric field value at the edges of field plate. Several termination topologies have been proposed to solve this problem. Parametric simulations were used to optimize the geometrical termination structure in order to reduce the electric field peak value at its edge while maintaining high breakdown voltage. The new solutions have helped reducing the maximum electric field from 57 MV/cm down to 22.7 MV/cm
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