The uniform energy distribution of top-hat laser beams is a very attractive property that can offer some advantages compared to Gaussian beams. Especially, the desired intensity distribution can be achieved at the laser spot through energy redistribution across the beam spatial profile and, thus, to minimize and even eliminate some inherent shortcomings in laser micro-processing. This paper reports an empirical study that investigates the effects of top-hat beam processing in micro-structuring and compares the results with those obtainable with a conventional Gaussian beam. In particular, a refractive field mapping beam shaper was used to obtain a top-hat profile and the effects of different scanning strategies, pulse energy settings, and accumulated fluence, i.e., hatch and pulse distances, were investigated. In general, the top-hat laser processing led to improvements in surface and structuring quality. Especially, the taper angle was reduced while the surface roughness and edge definition were also improved compared to structures produced with Gaussian beams. A further decrease of the taper angle was achieved by combining hatching with some outlining beam passes. The scanning strategies with only outlining beam passes led to very high ablation rates but in expense of structuring quality. Improvements in surface roughness were obtained with a wide range of pulse energies and pulse and hatch distances when top-hat laser processing was used.
The average power of ultrashort laser source has been increasing continuously and, therefore, solutions are required to employ fully these technology advances for improving the ablation efficiency in laser micro-processing. The use of burst mode processing is one of the solutions that has attracted a significant research and industrial interest in the past decade. A novel empirical methodology is proposed and implemented in this research to assess the MHz burst mode impact on the specific removal rate (SRR) and processing efficiency in ultrashort laser micro-machining. Especially, the capability of the MHz burst mode processing is investigated to scale up SRRs achievable on copper and stainless steel while utilising fully the available maximum pulse energy and average laser power. The results showed that the MHz burst mode offer a significant SRR scalability potential that can be attributed to beneficial near optimum fluence level and other side effects such as heat accumulation. Also, it is evidenced from the obtained results that the surface quality attained with the burst mode processing was comparable to that achieved with the single-pulse processing and even better at some specific process settings. Thus, the obtained SRR improvements were not in expense of the surface quality and the MHz bust mode processing represents a promising solution to employ fully the constantly increasing average power in ultrashort laser processing operations.
Résumé : L'étude présentée porte sur la simulation 2-D de l'expansion d'un plasma induit par ablation laser W sous atmosphère neutre. L'écoulement bidimensionnel, axisymètrique, instationnaire, dissipatif et ionisé est étudié par la résolution des équations de Navier-Stokes. L'ablation laser étudiée est celle d'un matéiau simple, le silicium (Si) sous atmosphère d'argon ou d'hélium. L'écoulement est constitué de quatre espèces monoatomiques Si, Si+, électrons et Arme. L'ionisation est considérée hors équilibre et caractérisée par des processus tels que l'ionisation par impact électronique, la recombinaison à trois corps et la recombinaison radiative.
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