We fabricated a calcium fluoride (CaF2) whispering gallery mode (WGM) microcavity with a computer controlled ultra-precision cutting process. We observed a thermo-opto-mechanical (TOM) oscillation in the CaF2 WGM microcavity, which may influence the stability of the optical output when the cavity is employed for Kerr comb generation. We studied experimentally and numerically the mechanism of the TOM oscillation and showed that it is strongly dependent on cavity diameter. In addition, our numerical study suggests that a microcavity structure fabricated with a hybrid material (i.e. CaF2 and silicon), which is compatible with an ultra-high Q and high thermal conductivity, will allow us to reduce the TOM oscillation and stabilize the optical output.

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