The need of a powerful multiphysics software, to simulate different topologies of deformable micro structures, is under investigation. The criteria for choosing the software is the precision of the results with an acceptable time of calculation to simulate many models with different variables. The existance of a new software, COMSOL 3.3, at a time linking all the physics and having a good interactive interface seemed to be a good solution. Being new, and under development, COMSOL 3.3 needed to be valid on different points. As a first step, we validated the numerical platform by comparing results of different softwares and some analytical solutions. The basic advantages and drawbacks of each software were considered for the final decision on the choice of the software that will be used. In terms of time of calculation, we found very intressting results on the speed of COMSOL to solve the problem when compared to ANSYS, while keeping the same precision of calculation.
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