The power conversion efficiency (PCE) of organic photovoltaic (OPV) modules with 9.5% (25 cm2) and 8.7% (802 cm2) have been demonstrated. This PCE of the module exceeded our previous world records of 8.5% (25 cm2) and 6.8% (396 cm2) that were listed in the latest Solar Cell Efficiency Tables ver.43 [1]. Both module design and coating/patterning technique were consistently studied for module development. In order to achieve highly efficient modules, we increased the ratio of photo-active area to designated illumination area to 94% without any scribing process and placed insulating layers in order to decrease the leakage current. The meniscus coating method was used for the fabrication of both buffer and photoactive layers. This technique ensures the fabrication of uniform and nanometer order thickness layers with thickness variation less than 3%. Furthermore, the PCE of the OPV under indoor illumination was found to be higher than that of the conventional Si type solar cells. This indicates that OPVs are promising as electrical power supplies for indoor applications. Therefore, we have also developed several prototypes for electronics integrated photovoltaics (EIPV) such as electrical shelf labels and wireless sensors embedded with our OPV modules, which can be operated by indoor lights.
This paper reports upon a new process for the flow sensor fabrication of a thermal microelectromechanical systems (MEMS) and its performance improvement. A unique feature of the proposed process is the silicon etching, which is a combination of normal crystal-oriented silicon etching and isotropic etching of polycrystalline silicon (poly-Si). The poly-Si layer works as a sacrificial layer and promotes etching of the silicon substrate in the horizonal direction, thereby enabling location of the etching holes in the membrane of the flow sensor without the conventional etching rules. Some designs for the flow sensors, which have been infeasible with normal processes, were thus fabricated and evaluated. Hence, the new process improves the design flexibility of the membrane and enhances flow sensor performance, such as 38.3% reduction in power consumption.
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