In this work, a sensitive and robust vacuum ultra-violet (VUV) single-photon ionization (SPI) ion trap time-of-flight mass spectrometer (VUV-SPI-IT-TOFMS) for on-line, realtime monitoring of chlorinated organic compounds in waste incineration flue gas has been newly developed. The fragment-free SPI technique with 121.6-nm VUV lamp irradiated by a microwave generator and the quadrupole ion trap to accumulate and select analyte ions were combined with a reflectron time-of-flight mass spectrometer to detect chlorinated organic compounds at trace level. This measuring system was tuned up to detect dioxins precursors with the aim at an application to monitoring trace level toxic substances in flue gases from incinerator furnaces. As a result, this technology has made it possible to analyze trichlorobenzene (T3CB), a dioxin precursor, in 18 s with a sensitivity of 80 ng/m3-N (10 pptv) using the selective accumulation of analyte substances and separation of interfering substances in the ion trap. Moreover, the first field test of the continuous monitoring T3CB in an actual waste incineration flue gas had been done for 7 months. The results show that this system has an exceeding robust performance and is able to maintain the high sensitivity in analyzing T3CB for long months of operation.
A non-uniform voltage distribution across a driven electrode results in inhomogeneous film deposition in large-area, very high-frequency (VHF) plasma reactors. Here we perform experimental and numerical studies on the voltage distribution across the electrode. Two kinds of dedicated vacuum chambers are prepared for one-and two-dimensional observations of the voltage and the plasma distributions. A comparison between the measured voltage and the plasma distribution clearly shows a good agreement between the two. In principle the plasma distribution is governed by the standing wave of the voltage on the driven electrode for an at least one-dimensional electrode. A numerical model based on transmission-line modelling is presented for calculating the voltage distribution. The influence of plasma conditions such as the electron density and the sheath length included in the model on the voltage distribution is investigated through comparison of the model predictions with the experimental results. The correlation between the plasma conditions and the propagation constant of the model suggests that the sheath length dominates the wavelength; in contrast, the electron density dominates the decay of the wave propagation. Using the parameters of the plasma conditions estimated from the experimental results, the model can predict the voltage distribution across a ladder electrode of size 45 cm × 55 cm in a large-area VHF plasma reactor.
Two very-high-frequency powers between which the phase difference is varying in split of time are supplied to a ladder-shaped electrode through multiple feeding points located at symmetrical positions of the electrode to generate a large-area uniform plasma. Theoretical calculations of the voltage distribution at several phase difference show good agreement with experiments. Plasma emission uniformity within ±15% is demonstrated at 60MHz for the substrate size of 1.4×1.1m, with nitrogen gas of 10Pa.
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