A highly ordered metal nanohole array (platinum and gold) was fabricated by a two-step replication of the honeycomb structure of anodic porous alumina. Preparation of the negative porous structure of porous alumina followed by the formation of the positive structure with metal resulted in a honeycomb metallic structure. The metal hole array of the film has a uniform, closely packed honeycomb structure approximately 70 nanometers in diameter and from 1 to 3 micrometers thick. Because of its textured surface, the metal hole array of gold showed a notable color change compared with bulk gold.
A highly ordered gold nanodot array was fabricated by vacuum evaporation using an anodic porous alumina membrane with through-holes of nanometer scale as a mask. This technique resulted in an orderly arrangement of Au dots with a diameter of approximately 40 nm over a large area on a Si substrate.
The development of the ordered channel array in the anodic porous alumina was initiated by the textured pattern of the surface made by the molding process, and growth of an almost defect-free channel array can be achieved throughout the textured area. The long-range-ordered channel array with dimensions on the order of millimeters with a channel density of 1010 cm−2 was obtained, and the aspect ratio was over 150. The master for molding could be used many times, which makes it possible to overcome problems in the conventional nanolithographic technique, such as low through-put and high cost.
Self‐ordering of the cell arrangement of the porous structure of anodic alumina has been studied in a sulfuric acid solution. Ordering of the cell arrangement was dependent on the applied potential, and a highly ordered structure was obtained under anodization at a constant potential of 25 to 27 V. Self‐ordering of the porous structure proceeded with the growth of the oxide layer under anodization at an appropriate potential, and a porous film with an almost ideal hexagonal honeycomb structure was formed over an area of several micrometers after a long period of anodization.
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