The thin films consisting of crystalline ZnO particles were prepared on fluorine-doped tin oxide electrodes by electroless deposition. The particles were deposited from an aqueous solution containing zinc nitrate, dimethyamine−borane, and eosin Y at 328 K. As the Pd particles were adsorbed on the substrate, not only the eosin Y monomer but also the dimer and debrominated species were rapidly adsorbed on the spherical ZnO particles, which were aggregated and formed secondary particles. On the other hand, in the absence of the Pd particles, the monomer was adsorbed on the flake-shaped ZnO particles, which vertically grew on the substrate surface and had a high crystallinity. The photoelectric conversion efficiency was higher for the ZnO electrodes containing a higher amount of the monomer during light irradiation.
To curtail manufacturing cost of PZT pyroelectric sensor device, we reduced ion milling and ashing process by the lift-off method Pt formation and CSD method PZT thin film deposition. Remanent polarization of the PZT film on patterned Pt was approximately 2P r = 15 μC/cm 2 . This value was 2/3 of all over coated Pt deposited at 600 °C, but its pyroelectric current was 0.6 pA/mm 2 . PZT on SiO 2 /Si has cracks, but by splitting the SiO 2 face into 20 μm rectangular through patterning Pt, these cracks were reduced to 20 %. Furthermore, ladder-formed Pt electrode was satisfactory for crack-free PZT film on SiO 2 /Si.
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